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Uncertainty quantification and parameter optimization of plasma etching process using heteroscedastic Gaussian process

Fuente: arXiv

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Bibliographic Details
Main Authors:	Jung, Yongsu, Kang, Minji, Kim, Muyoung, Choi, Min Sup, Kim, Hyeong-U, Kim, Jaekwang
Format:	Preprint
Published:	2025
Subjects:	Popular Physics Applications
Online Access:	Acceder al recurso
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