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Main Authors: Chen, Zhichao, Gupta, Puneet
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2511.05506
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author Chen, Zhichao
Gupta, Puneet
author_facet Chen, Zhichao
Gupta, Puneet
contents Three-dimensional (3D) integration continues to advance Moore's Law by facilitating dense interconnects and enabling multi-tier system architectures. Among the various integration approaches, Cu-Cu hybrid bonding has emerged as a leading solution for achieving high interconnect density in chiplet integration. In this work, we present YAP+, a yield modeling framework specifically tailored for wafer-to-wafer (W2W) and die-to-wafer (D2W) hybrid bonding processes. YAP+ incorporates a comprehensive set of yield-impacting failure mechanisms, including overlay misalignment, particle defects, Cu recess variations, surface roughness, and Cu pad density. Furthermore, YAP+ supports pad layout-aware yield analysis, considering critical, redundant, and dummy pads across arbitrary 2D physical layout patterns. To support practical evaluation, we developed an open-source yield simulator, demonstrating that our near-analytical model matches simulation accuracy while achieving over 1,000x speedup in runtime. This performance makes YAP+ a valuable tool for co-optimizing packaging technologies, assembly design rules, and system-level design strategies. Beyond W2W-D2W comparisons, we leverage YAP+ to investigate the impact of pad layout patterns, bonding pitch, and pad ratios across different pad types, and explore the benefits of strategically placing redundant pad replicas.
format Preprint
id arxiv_https___arxiv_org_abs_2511_05506
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle YAP+: Pad-Layout-Aware Yield Modeling and Simulation for Hybrid Bonding
Chen, Zhichao
Gupta, Puneet
Hardware Architecture
Materials Science
Three-dimensional (3D) integration continues to advance Moore's Law by facilitating dense interconnects and enabling multi-tier system architectures. Among the various integration approaches, Cu-Cu hybrid bonding has emerged as a leading solution for achieving high interconnect density in chiplet integration. In this work, we present YAP+, a yield modeling framework specifically tailored for wafer-to-wafer (W2W) and die-to-wafer (D2W) hybrid bonding processes. YAP+ incorporates a comprehensive set of yield-impacting failure mechanisms, including overlay misalignment, particle defects, Cu recess variations, surface roughness, and Cu pad density. Furthermore, YAP+ supports pad layout-aware yield analysis, considering critical, redundant, and dummy pads across arbitrary 2D physical layout patterns. To support practical evaluation, we developed an open-source yield simulator, demonstrating that our near-analytical model matches simulation accuracy while achieving over 1,000x speedup in runtime. This performance makes YAP+ a valuable tool for co-optimizing packaging technologies, assembly design rules, and system-level design strategies. Beyond W2W-D2W comparisons, we leverage YAP+ to investigate the impact of pad layout patterns, bonding pitch, and pad ratios across different pad types, and explore the benefits of strategically placing redundant pad replicas.
title YAP+: Pad-Layout-Aware Yield Modeling and Simulation for Hybrid Bonding
topic Hardware Architecture
Materials Science
url https://arxiv.org/abs/2511.05506