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Sputtered AlN buffer layer for low-loss crystalline AlN-on-sapphire integrated photonics

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Bibliographic Details
Main Authors:	Brunetta, Samuele, Sbarra, Samantha, Loke, Brandon Shuen Yi, Carlin, Jean-François, Grandjean, Nicolas, Brès, Camille-Sophie, Butté, Raphaël
Format:	Preprint
Published:	2025
Subjects:	Optics
Online Access:	Acceder al recurso
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