Unitho: A Unified Multi-Task Framework for Computational Lithography

Fuente: arXiv

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Bibliographic Details
Main Authors:	Jin, Qian, Liu, Yumeng, Jiang, Yuqi, Sun, Qi, Zhuo, Cheng
Format:	Preprint
Published:	2025
Subjects:	Machine Learning
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2511.10255