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Unitho: A Unified Multi-Task Framework for Computational Lithography

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Jin, Qian, Liu, Yumeng, Jiang, Yuqi, Sun, Qi, Zhuo, Cheng
Format:	Preprint
Publié:	2025
Sujets:	Machine Learning
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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