Cover Image

In-vacuum surface flashover of SiN, AlN, and etched SiO2 thin films at micrometre scales

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Kumar, Vijay, Siegele-Brown, Martin, Aylett, Matthew, Weidt, Sebastian, Hensinger, Winfried Karl
Format:	Preprint
Published:	2025
Subjects:	Materials Science Quantum Physics
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Fast-response low power atomic oven for integration into an ion microchip
by: Kumar, Vijay, et al.
Published: (2025)

Ablation Removal of Transport-Blocking Defects in Surface-Electrode Ion Traps
by: Maddock, Toby, et al.
Published: (2026)

Fabrication of Surface Ion Traps with Integrated Current Carrying Wires enabling High Magnetic Field Gradients
by: Siegele-Brown, Martin, et al.
Published: (2022)

Si/AlN p-n heterojunction interfaced with ultrathin SiO2
by: Abbasi, Haris Naeem, et al.
Published: (2024)

The Impact of Hardware Specifications on Reaching Quantum Advantage in the Fault Tolerant Regime
by: Webber, Mark, et al.
Published: (2021)

Molecular dynamics simulations on ferroelectricity of AlN thin films
by: Binghui Deng, et al.
Published: (2024)

Broadband on-chip SiN lasers
by: Liu, Ken
Published: (2025)

Grafted Low-Leakage Si/AlN p-n Diodes Enabled by Fluorinated AlN Interface
by: Lu, Yi, et al.
Published: (2026)

GaN growth on (111) Si with very thin amorphous SiN layer by ECR plasma-assisted MBE
by: Masao Tamura
Published: (2001)

Nondestructive Metrology of SiO/SiN Multilayer Stack by X‐Ray Reflectometry and Comparison With TEM Results
by: Naiming Liu, et al.
Published: (2026)

Structural and optical properties of self-assembled AlN nanowires grown on SiO2/Si substrates by molecular beam epitaxy
by: Gačević, Ž., et al.
Published: (2024)

Experimental observation of ballistic to diffusive transition in AlN thin films
by: Hoque, Md Shafkat Bin, et al.
Published: (2024)

Nanowire Lasing With SiN Microring Resonator
by: Ruixuan Yi, et al.
Published: (2026)

AlN/Si interface engineering to mitigate RF losses in MOCVD grown GaN-on-Si substrates
by: Cardinael, Pieter, et al.
Published: (2024)

Supercontinuum generation in 2D graphene oxide film coated SiN waveguides
by: Moss, David J.
Published: (2026)

Performance of Superconducting Resonators Suspended on SiN Membranes
by: Chistolini, Trevor, et al.
Published: (2024)

An Inversely Designed Reconstructive Spectrometer on SiN Platform
by: Ang Li, et al.
Published: (2024)

Combustion synthesis of Eu,Si‐doped AlN blue phosphor with varying Eu and Si concentrations
by: Genki Saito, et al.
Published: (2025)

Accelerating the development of oxynitride thin films: A combinatorial investigation of the Al-Si-O-N system
by: Frick, Stefanie, et al.
Published: (2025)

Long-range optomechanical interactions in SiN membrane arrays
by: Yao, Xiong, et al.
Published: (2024)

Auger parameter analysis for TiN and AlN thin films via combined in-situ XPS and HAXPES
by: Pshyk, O. V., et al.
Published: (2025)

Beyond structural stabilization of highly-textured AlN thin film: the role of chemical effects
by: Pshyk, O. V., et al.
Published: (2024)

AlN film deposition as a semiconductor device
by: Julio Cesar Caicedo
Published: (2013)

Integrated emitters with CMOS-compatible tuning for large scale quantum SiN photonic circuits
by: De Witte, Jasper, et al.
Published: (2025)

Dual‐Layer SiN x /SiO 2 as Antireflective Coatings for Optical and Electrical Enhancement in Passivated Emitter and Rear Contact Solar Cells
by: Alamgeer, et al.
Published: (2025)

Overcoming stress limitations in SiN nonlinear photonics via a bilayer waveguide
by: McNulty, Karl J., et al.
Published: (2024)

Overcoming stress limitations in SiN nonlinear photonics via a bilayer waveguide
by: Karl J. McNulty, et al.
Published: (2025)

Metal-organic chemical vapor deposition of MgSiN$_{2}$ thin films
by: Vangipuram, Vijay Gopal Thirupakuzi, et al.
Published: (2025)

Molecular Beam Homoepitaxy of N-polar AlN on bulk AlN substrates
by: Singhal, Jashan, et al.
Published: (2022)

Shubnikov-de Haas oscillations in coherently strained AlN/GaN/AlN quantum wells on bulk AlN substrates
by: Chen, Yu-Hsin, et al.
Published: (2025)

Ferroelectric Al$_{1-x}$B$_x$N sputtered thin films on n-type Si bottom electrodes
by: Mercer, Ian, et al.
Published: (2025)

Cryogenic‐Assisted Hydrogen Fluoride Surface Reactions Enabling Reversibly Ultra‐High Selectivity of Atomic Layer Etching Between SiO 2 and SiN
by: Shih‐Nan Hsiao, et al.
Published: (2025)

Demonstration of Si-doped Al-rich thin regrown Al(Ga)N films on AlN on sapphire templates with $\gt10^{15}/cm^3$ free carrier concentration using close-coupled showerhead MOCVD reactor
by: Mukhopadhyay, Swarnav, et al.
Published: (2024)

Metalorganic Chemical Vapor Deposition of AlScN Thin Films and AlScN/AlN/GaN Heterostructures
by: Vangipuram, Vijay Gopal Thirupakuzi, et al.
Published: (2025)

Comparative structural study of Al 2 O 3 –SiO 2 glasses and amorphous thin films
by: Sirine Ben Khemis, et al.
Published: (2024)

Impact of AlN buffer thickness on electrical and thermal characteristics of AlGaN/GaN/AlN HEMTs
by: Kim, Minho, et al.
Published: (2025)

SiN integrated photonic components in the Visible to Near-Infrared spectral region
by: Sanna, Matteo, et al.
Published: (2023)

Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators
by: Saleh, Yahya, et al.
Published: (2025)

Effect of the Twist Crystallinity of N‐Polar AlN Underlayer on the Electrical Properties of GaN/AlN Structures
by: Taketo Kowaki, et al.
Published: (2024)

Structural, optical and mechanical properties of AlN films - effect of thickness
by: M. Aguilar Frutis
Published: (2003)