Secondary electron topographical contrast formation in scanning transmission electron microscopy

Fuente: arXiv
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Main Authors: Vlasov, Evgenii, Heyvaert, Wouter, Stoops, Tom, Van Aert, Sandra, Verbeeck, Johan, Bals, Sara
Format: Preprint
Published: 2025
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author Vlasov, Evgenii
Heyvaert, Wouter
Stoops, Tom
Van Aert, Sandra
Verbeeck, Johan
Bals, Sara
author_facet Vlasov, Evgenii
Heyvaert, Wouter
Stoops, Tom
Van Aert, Sandra
Verbeeck, Johan
Bals, Sara
contents Secondary electron (SE) imaging offers a powerful complementary capabilities to conventional scanning transmission electron microscopy (STEM) by providing surface-sensitive, pseudo-3D topographic information. However, contrast interpretation of such images remains empirical due to complex interactions of emitted SE with the magnetic field in the objective field of TEM. Here, we propose an analytical physical model that takes into account the physics of SE emission and interaction of the emitted SEs with magnetic field. This enables more reliable image interpretation and potentially lay the foundation for novel 3D surface reconstruction algorithms.
format Preprint
id arxiv_https___arxiv_org_abs_2511_14491
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Secondary electron topographical contrast formation in scanning transmission electron microscopy
Vlasov, Evgenii
Heyvaert, Wouter
Stoops, Tom
Van Aert, Sandra
Verbeeck, Johan
Bals, Sara
Applied Physics
Secondary electron (SE) imaging offers a powerful complementary capabilities to conventional scanning transmission electron microscopy (STEM) by providing surface-sensitive, pseudo-3D topographic information. However, contrast interpretation of such images remains empirical due to complex interactions of emitted SE with the magnetic field in the objective field of TEM. Here, we propose an analytical physical model that takes into account the physics of SE emission and interaction of the emitted SEs with magnetic field. This enables more reliable image interpretation and potentially lay the foundation for novel 3D surface reconstruction algorithms.
title Secondary electron topographical contrast formation in scanning transmission electron microscopy
topic Applied Physics
url https://arxiv.org/abs/2511.14491