Low-to-mid Al content ($x\sim$ 0-0.56) Al$_x$In$_{1-x}$N layers deposited on Si(100) by radio-frequency sputtering
Fuente:
arXiv
Guardado en:
| Autores principales: | Blasco, R., Valdueza-Felip, S., Montero, D., Sun, M., Olea, J., Naranjo, F. B. |
|---|---|
| Formato: | Preprint |
| Publicado: |
2025
|
| Materias: | |
| Acceso en línea: | |
| Etiquetas: |
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