Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS

Fuente: arXiv
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Bibliographic Details
Main Authors: Kim, Byeongjin, Anderson, Ian, Hsu, Tzu-Hsuan, Yao, Ziqian, Chaudhari, Mihir, Cho, Sinwoo, Lu, Ruochen
Format: Preprint
Published: 2025
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