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Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS

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Bibliographic Details
Main Authors:	Kim, Byeongjin, Anderson, Ian, Hsu, Tzu-Hsuan, Yao, Ziqian, Chaudhari, Mihir, Cho, Sinwoo, Lu, Ruochen
Format:	Preprint
Published:	2025
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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