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Tuning Breakdown-to-Coercive Field Ratio in Ultra-Thin Al1-xScxN Films via Reactive Nitrogen Atmosphere

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Bibliographic Details
Main Authors:	Zhang, Yinuo, Smith, Walter J., Esteves, Giovanni, Stach, Eric A., Beechem, Thomas E., Olsson III, Roy H.
Format:	Preprint
Published:	2025
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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