Enregistré dans:
| Auteurs principaux: | , , , , , , , , , |
|---|---|
| Format: | Preprint |
| Publié: |
2025
|
| Sujets: | |
| Accès en ligne: | https://arxiv.org/abs/2511.18480 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
| _version_ | 1866908670935171072 |
|---|---|
| author | Zhang, Zhijia Gudarzi, Mohsen Moazzami Mao, Jiatong Wang, Ziwei Bedran, Zakhar Chen, Chuhongxu Nonahal, Milad Timokhin, Ivan Mishchenko, Artem Yang, Qian |
| author_facet | Zhang, Zhijia Gudarzi, Mohsen Moazzami Mao, Jiatong Wang, Ziwei Bedran, Zakhar Chen, Chuhongxu Nonahal, Milad Timokhin, Ivan Mishchenko, Artem Yang, Qian |
| contents | Two-dimensional (2D) nanochannels have emerged as a pivotal platform for exploring nanoscale hydrodynamics and electrokinetics. Conventional fabrication methods to make nanochannels often introduce polymer contamination and require lengthy processing, limiting device performance and scalability. Here we introduce the Mask & Stack method, employing silicon nitride stencil mask combined with dry transfer stacking to rapidly fabricate ultraclean vdW nanochannels within hours. This polymer-free approach preserves pristine interfaces, confirmed by atomic force microscopy and Raman spectroscopy, and yields nanochannel devices exhibiting reproducible ionic transport and long-term stability. The streamlined process is compatible with diverse 2D materials and promising for upscale production. Our method advances the fabrication of nanofluidic and 2D heterostructure devices, facilitating applications in quantum transport, photonics, energy harvesting, and sensing technologies requiring high-throughput, contamination-free heterostructure architectures. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2511_18480 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Rapid fabrication of clean van der Waals nanochannels using Mask and Stack method Zhang, Zhijia Gudarzi, Mohsen Moazzami Mao, Jiatong Wang, Ziwei Bedran, Zakhar Chen, Chuhongxu Nonahal, Milad Timokhin, Ivan Mishchenko, Artem Yang, Qian Mesoscale and Nanoscale Physics Two-dimensional (2D) nanochannels have emerged as a pivotal platform for exploring nanoscale hydrodynamics and electrokinetics. Conventional fabrication methods to make nanochannels often introduce polymer contamination and require lengthy processing, limiting device performance and scalability. Here we introduce the Mask & Stack method, employing silicon nitride stencil mask combined with dry transfer stacking to rapidly fabricate ultraclean vdW nanochannels within hours. This polymer-free approach preserves pristine interfaces, confirmed by atomic force microscopy and Raman spectroscopy, and yields nanochannel devices exhibiting reproducible ionic transport and long-term stability. The streamlined process is compatible with diverse 2D materials and promising for upscale production. Our method advances the fabrication of nanofluidic and 2D heterostructure devices, facilitating applications in quantum transport, photonics, energy harvesting, and sensing technologies requiring high-throughput, contamination-free heterostructure architectures. |
| title | Rapid fabrication of clean van der Waals nanochannels using Mask and Stack method |
| topic | Mesoscale and Nanoscale Physics |
| url | https://arxiv.org/abs/2511.18480 |