Al$_{1-x}$Hf$_{x}$N Thin Films with Enhanced Piezoelectric Responses for GHz Surface Acoustic Wave Devices

Fuente: arXiv
Saved in:
Bibliographic Details
Main Authors: Wagner, Laura I., Streibel, Verena, Luna, Esperanza, Flashar, Katarina S., Anders, Walid, Volkmer, Nicole, Steffen, Doreen, Munnik, Frans, Zewdie, Tsedenia A., Santra, Saswati, Sharp, Ian D., Yuan, Mingyun
Format: Preprint
Published: 2025
Subjects:
Online Access:
Tags: Add Tag
No Tags, Be the first to tag this record!