Mode-resolved logarithmic quasiballistic heat transport in thin silicon layers: Semianalytic and Boltzmann transport analysis

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Main Author: Jin, Jae Sik
Format: Preprint
Published: 2025
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author Jin, Jae Sik
author_facet Jin, Jae Sik
contents Nonequilibrium phonon transport driven by nanoscale hotspot heating in silicon device layers governs heat dissipation in advanced microelectronics and underscores the need for a better microscopic understanding of such processes. Yet the origin of the frequently observed logarithmic (ln) dependence of the apparent thermal response on hotspot size in crystalline silicon, and the role of individual phonon modes in this regime, remain unclear. Here, we develop a semianalytical, mode-resolved framework in the spectral phonon mean free path (MFP) domain and validate it against a full-phonon-dispersion Boltzmann transport model for heat removal from a 10 x 10 nm^2 hotspot in a thin Si layer (thicknesses of 41, 78, and 177 nm) representative of a silicon-on-insulator transistor. We show that ln-type quasiballistic scaling arises only for modes that lie on a log-uniform conductivity plateau and are diffusive-side or quasiballistic with respect to the hotspot size, whereas fully ballistic long-MFP modes contribute a saturated, nonlogarithmic background, leading to extremely slow suppression of their heat-carrying capability. The resulting phonon-modal nonlocal spectrum establishes spectral selection rules for ln-regime transport in confined Si and provides a compact basis for incorporating mode-selective quasiballistic corrections into continuum thermal models and for interpreting phonon-resolved thermometry experiments.
format Preprint
id arxiv_https___arxiv_org_abs_2512_05522
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Mode-resolved logarithmic quasiballistic heat transport in thin silicon layers: Semianalytic and Boltzmann transport analysis
Jin, Jae Sik
Materials Science
Nonequilibrium phonon transport driven by nanoscale hotspot heating in silicon device layers governs heat dissipation in advanced microelectronics and underscores the need for a better microscopic understanding of such processes. Yet the origin of the frequently observed logarithmic (ln) dependence of the apparent thermal response on hotspot size in crystalline silicon, and the role of individual phonon modes in this regime, remain unclear. Here, we develop a semianalytical, mode-resolved framework in the spectral phonon mean free path (MFP) domain and validate it against a full-phonon-dispersion Boltzmann transport model for heat removal from a 10 x 10 nm^2 hotspot in a thin Si layer (thicknesses of 41, 78, and 177 nm) representative of a silicon-on-insulator transistor. We show that ln-type quasiballistic scaling arises only for modes that lie on a log-uniform conductivity plateau and are diffusive-side or quasiballistic with respect to the hotspot size, whereas fully ballistic long-MFP modes contribute a saturated, nonlogarithmic background, leading to extremely slow suppression of their heat-carrying capability. The resulting phonon-modal nonlocal spectrum establishes spectral selection rules for ln-regime transport in confined Si and provides a compact basis for incorporating mode-selective quasiballistic corrections into continuum thermal models and for interpreting phonon-resolved thermometry experiments.
title Mode-resolved logarithmic quasiballistic heat transport in thin silicon layers: Semianalytic and Boltzmann transport analysis
topic Materials Science
url https://arxiv.org/abs/2512.05522