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Main Authors: Lan, Qing, Song, Wenqing, Zhu, Siyin, Zhou, Yi, Wang, Lu, Wei, Junjie, Liu, Jiaqi, Guo, Zejing, Taniguchi, Takashi, Watanabe, Kenji, Huang, Hai, Wang, Jingli, Zhou, Xiaodong, Zettl, Alex, Shen, Jian, Shi, Wu
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2512.06318
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author Lan, Qing
Song, Wenqing
Zhu, Siyin
Zhou, Yi
Wang, Lu
Wei, Junjie
Liu, Jiaqi
Guo, Zejing
Taniguchi, Takashi
Watanabe, Kenji
Huang, Hai
Wang, Jingli
Zhou, Xiaodong
Zettl, Alex
Shen, Jian
Shi, Wu
author_facet Lan, Qing
Song, Wenqing
Zhu, Siyin
Zhou, Yi
Wang, Lu
Wei, Junjie
Liu, Jiaqi
Guo, Zejing
Taniguchi, Takashi
Watanabe, Kenji
Huang, Hai
Wang, Jingli
Zhou, Xiaodong
Zettl, Alex
Shen, Jian
Shi, Wu
contents The ability to reversibly and site-selectively tune ambipolar doping in a single semiconductor is crucial for reconfigurable electronics beyond silicon, but remains highly challenging. Here, we present a rewritable architecture based on electron-beam programmable field-effect transistors (FETs). Using WSe$_2$ as a model system, we demonstrate electron-beam-induced doping that enables reversible, precisely controlled carrier modulation exceeding $10^{13}$ cm$^{-2}$. The in-situ writing, erasing, and rewriting of ambipolar doping of nanoscale patterns was directly visualized by scanning microwave impedance microscopy. This mask-free, lithography-compatible approach can achieve precise band engineering within individual channels, yielding near-ideal subthreshold swings (~ 60 mV/dec) and finely tunable threshold voltages for both carrier types without specialized contact engineering. These capabilities allow on-demand realization of high performance logic, including CMOS inverters with high voltage gains and low power consumption, as well as NAND-to-NOR transitions on the same device via direct polarity rewriting. Our platform offers a scalable and versatile route for rapid prototyping of complementary electronics.
format Preprint
id arxiv_https___arxiv_org_abs_2512_06318
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Rewritable Complementary Nanoelectronics Enabled by Electron-Beam Programmable Ambipolar Doping
Lan, Qing
Song, Wenqing
Zhu, Siyin
Zhou, Yi
Wang, Lu
Wei, Junjie
Liu, Jiaqi
Guo, Zejing
Taniguchi, Takashi
Watanabe, Kenji
Huang, Hai
Wang, Jingli
Zhou, Xiaodong
Zettl, Alex
Shen, Jian
Shi, Wu
Materials Science
The ability to reversibly and site-selectively tune ambipolar doping in a single semiconductor is crucial for reconfigurable electronics beyond silicon, but remains highly challenging. Here, we present a rewritable architecture based on electron-beam programmable field-effect transistors (FETs). Using WSe$_2$ as a model system, we demonstrate electron-beam-induced doping that enables reversible, precisely controlled carrier modulation exceeding $10^{13}$ cm$^{-2}$. The in-situ writing, erasing, and rewriting of ambipolar doping of nanoscale patterns was directly visualized by scanning microwave impedance microscopy. This mask-free, lithography-compatible approach can achieve precise band engineering within individual channels, yielding near-ideal subthreshold swings (~ 60 mV/dec) and finely tunable threshold voltages for both carrier types without specialized contact engineering. These capabilities allow on-demand realization of high performance logic, including CMOS inverters with high voltage gains and low power consumption, as well as NAND-to-NOR transitions on the same device via direct polarity rewriting. Our platform offers a scalable and versatile route for rapid prototyping of complementary electronics.
title Rewritable Complementary Nanoelectronics Enabled by Electron-Beam Programmable Ambipolar Doping
topic Materials Science
url https://arxiv.org/abs/2512.06318