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Chemical Vapor Deposition of Nitrides by Carbon-free Brominated Precursors

Fuente: arXiv
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Bibliographic Details
Main Authors: Leone, Stefano, Duarte, Teresa, Menner, Hanspeter, Richter, Jannik, Kirste, Lutz, Maegdefessel, Sven, Hoffmann, Felix, So, Byeongchan, Quay, Ruediger
Format: Preprint
Published: 2025
Subjects:
Materials Science
Online Access:
Acceder al recurso
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