Heterogeneous back-end-of-line integration of thin-film lithium niobate on active silicon photonics for single-chip optical transceivers

Fuente: arXiv
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Bibliographic Details
Main Authors: Wu, Lingfeng, Zhou, Zhonghao, Ma, Weilong, Wang, Haohua, Ruan, Ziliang, Guo, Changjian, Gao, Shiqing, Huang, Zhishan, Qi, Lu, Liu, Jie, Feng, Jing, Liu, Dapeng, Chen, Kaixuan, Liu, Liu
Format: Preprint
Published: 2025
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