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Heterogeneous back-end-of-line integration of thin-film lithium niobate on active silicon photonics for single-chip optical transceivers

Fuente: arXiv

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Bibliographic Details
Main Authors:	Wu, Lingfeng, Zhou, Zhonghao, Ma, Weilong, Wang, Haohua, Ruan, Ziliang, Guo, Changjian, Gao, Shiqing, Huang, Zhishan, Qi, Lu, Liu, Jie, Feng, Jing, Liu, Dapeng, Chen, Kaixuan, Liu, Liu
Format:	Preprint
Published:	2025
Subjects:	Optics
Online Access:	Acceder al recurso
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