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Single-step laser patterning and thinning of biocompatible MEMS flow sensor

Fuente: arXiv

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Bibliographic Details
Main Authors:	Zukri, Mohammad Nizar Mohamed, Farisi, Muhammad Salman Al, Hasegawa, Yoshihiro, Shikida, Mitsuhiro
Format:	Preprint
Published:	2025
Subjects:	Instrumentation and Detectors
Online Access:	Acceder al recurso
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