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Main Authors: Zhao, He Lin, Afrid, Sheikh Mohd Ta-Seen, Yoon, Dongyoung, Martin, Zachary, Islam, Zakaria, Chen, Sihan, Zhang, Yue, Huang, Pinshane Y., Rakheja, Shaloo, van der Zande, Arend M.
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2512.08148
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author Zhao, He Lin
Afrid, Sheikh Mohd Ta-Seen
Yoon, Dongyoung
Martin, Zachary
Islam, Zakaria
Chen, Sihan
Zhang, Yue
Huang, Pinshane Y.
Rakheja, Shaloo
van der Zande, Arend M.
author_facet Zhao, He Lin
Afrid, Sheikh Mohd Ta-Seen
Yoon, Dongyoung
Martin, Zachary
Islam, Zakaria
Chen, Sihan
Zhang, Yue
Huang, Pinshane Y.
Rakheja, Shaloo
van der Zande, Arend M.
contents Understanding the interactions between strain, interfacial mechanics, and electrical performance is critical for designing beyond silicon electronics based on hetero-integrated 2D materials. Through combined experiment and simulation, we demonstrated and analyzed the enhancement of hole mobility in p-type monolayer $WSe_{2}$ field effect transistors (FETs) under biaxial compression. We tracked FET performance versus strain by incrementing compressive strain to $WSe_{2}$ channels via sequential AlOx deposition and performing intermediate photoluminescence and transport measurements. The hole mobility factor increased at a rate of 340 $\pm$ 95 %/%$ε$, and the on-current factor increased at a rate of 460 $\pm$ 340 %/%$ε$. Simulation revealed that the enhancement under compression arises primarily from a reduction in inter-valley scattering between the $Γ$--K valence bands, and the rate is robust against variations in carrier density, impurity density, or dielectric environment. These findings show that compressive strain is a powerful technique for enhancing performance in 2D p-FETs and that it is multiplicative with defect and doping engineering.
format Preprint
id arxiv_https___arxiv_org_abs_2512_08148
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Enhancing Hole Mobility in Monolayer $WSe_{2}$ p-FETs via Process-Induced Compression
Zhao, He Lin
Afrid, Sheikh Mohd Ta-Seen
Yoon, Dongyoung
Martin, Zachary
Islam, Zakaria
Chen, Sihan
Zhang, Yue
Huang, Pinshane Y.
Rakheja, Shaloo
van der Zande, Arend M.
Materials Science
Applied Physics
Understanding the interactions between strain, interfacial mechanics, and electrical performance is critical for designing beyond silicon electronics based on hetero-integrated 2D materials. Through combined experiment and simulation, we demonstrated and analyzed the enhancement of hole mobility in p-type monolayer $WSe_{2}$ field effect transistors (FETs) under biaxial compression. We tracked FET performance versus strain by incrementing compressive strain to $WSe_{2}$ channels via sequential AlOx deposition and performing intermediate photoluminescence and transport measurements. The hole mobility factor increased at a rate of 340 $\pm$ 95 %/%$ε$, and the on-current factor increased at a rate of 460 $\pm$ 340 %/%$ε$. Simulation revealed that the enhancement under compression arises primarily from a reduction in inter-valley scattering between the $Γ$--K valence bands, and the rate is robust against variations in carrier density, impurity density, or dielectric environment. These findings show that compressive strain is a powerful technique for enhancing performance in 2D p-FETs and that it is multiplicative with defect and doping engineering.
title Enhancing Hole Mobility in Monolayer $WSe_{2}$ p-FETs via Process-Induced Compression
topic Materials Science
Applied Physics
url https://arxiv.org/abs/2512.08148