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A Physics-Constrained, Design-Driven Methodology for Defect Dataset Generation in Optical Lithography

Fuente: arXiv

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Bibliographic Details
Main Authors:	Hu, Yuehua, Kong, Jiyeong, Shin, Dong-yeol, Kim, Jaekyun, Kang, Kyung-Tae
Format:	Preprint
Published:	2025
Subjects:	Computer Vision and Pattern Recognition Artificial Intelligence
Online Access:	Acceder al recurso
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