Single-crystalline high-quality beta-Ga2O3 pseudo-substrate on sapphire through sputtering for epitaxial deposition

Fuente: arXiv
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Bibliographic Details
Main Authors: Wang, Guangying, Xie, Shuwen, Brand, William, Khan, Saleh Ahmed, Ibreljic, Ahmed, Shima, Darryl, Ma, Yueying, Challa, Brahmani, Alema, Fikadu, Osinsky, Andrei, Bhuiyan, Anhar, Balakrishnan, Ganesh, Pasayat, Shubhra S.
Format: Preprint
Published: 2025
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