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Epitaxial Recovery of beta-Ga2O3 after High Dose Implantation

Fuente: arXiv

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Bibliographic Details
Main Authors:	Luo, Tianhai, Gann, Katie R., Gorsak, Cameron A., Nair, Hari P., van Dover, R. B., Thompson, Michal O.
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
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