Hybrid electrostatic-piezo MEMS photonic integrated modulators

Fuente: arXiv

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Bibliographic Details
Main Authors:	Le, Thuy-Linh, Singh, Hardit, Boyle, Julia M., Zimmermann, Matthew, Leenheer, Andrew J., Dominguez, Daniel, Eichenfield, Matt, Dong, Mark
Format:	Preprint
Published:	2025
Subjects:	Optics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2512.12383