Fabrication Optimization of Suspended Stencil Mask Lithography for Multi-Terminal Josephson Junctions
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arXiv
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| Autores principales: | , , , , |
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| Formato: | Preprint |
| Publicado: |
2025
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| _version_ | 1866912981915271168 |
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| author | Teller, Justus Jalil, Abdur Rehman Lentz, Florian Grützmacher, Detlev Schäpers, Thomas |
| author_facet | Teller, Justus Jalil, Abdur Rehman Lentz, Florian Grützmacher, Detlev Schäpers, Thomas |
| contents | Stencil mask lithography is an advanced technique for fully in-situ fabricating Josephson junctions, which is increasingly being used for multi-terminal Josephson junctions. This study provides information on the optimal mask design and mask reliability. For this, 270 mask designs were systematically fabricated and investigated under scanning electron microscope. Reliable statements are made about mask yield, minimal dimensions, and systematic dependencies on the number of superconducting terminals. We find that stencil mask lithography can be used reliably for fabricating multi-terminal Josephson junctions, enabling lateral mask dimensions down to 40$\,$nm on average. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2512_16690 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Fabrication Optimization of Suspended Stencil Mask Lithography for Multi-Terminal Josephson Junctions Teller, Justus Jalil, Abdur Rehman Lentz, Florian Grützmacher, Detlev Schäpers, Thomas Applied Physics Stencil mask lithography is an advanced technique for fully in-situ fabricating Josephson junctions, which is increasingly being used for multi-terminal Josephson junctions. This study provides information on the optimal mask design and mask reliability. For this, 270 mask designs were systematically fabricated and investigated under scanning electron microscope. Reliable statements are made about mask yield, minimal dimensions, and systematic dependencies on the number of superconducting terminals. We find that stencil mask lithography can be used reliably for fabricating multi-terminal Josephson junctions, enabling lateral mask dimensions down to 40$\,$nm on average. |
| title | Fabrication Optimization of Suspended Stencil Mask Lithography for Multi-Terminal Josephson Junctions |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2512.16690 |