Feedforward Compensation of Piezo Nonlinearity for High-Precision High-Speed Atomic Force Microscopy

Fuente: arXiv

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Bibliographic Details
Main Authors:	Umeda, Kenichi, Kodera, Noriyuki
Format:	Preprint
Published:	2025
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2512.18252