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Feedforward Compensation of Piezo Nonlinearity for High-Precision High-Speed Atomic Force Microscopy

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Umeda, Kenichi, Kodera, Noriyuki
Natura:	Preprint
Pubblicazione:	2025
Soggetti:	Applied Physics
Accesso online:	Acceder al recurso
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