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Feedforward Compensation of Piezo Nonlinearity for High-Precision High-Speed Atomic Force Microscopy

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Umeda, Kenichi, Kodera, Noriyuki
Format:	Preprint
Publié:	2025
Sujets:	Applied Physics
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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