Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering

Fuente: arXiv

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Bibliographic Details
Main Authors:	Nayak, Sanjay, Nallagatla, Venkata Raveendra, Bisht, Ravindra Singh, Solonenko, Dmytro, Henzen, Demian, Ali, Washim Reza, Lazzari, Carla Maria, Frost, Robert JW, Serafini, Andrea, Codegoni, Davide, Balsamo, Amalia, Scaldaferri, Rossana, Allahyari, Elaheh, Ghosh, Anirban, Kratzer, Martin, Picco, Andrea, Costantini, Sonia, Rusconi, Andrea, Moridi, Mohssen, Campanella, Humberto, Deluca, Marco, De Pastina, Annalisa
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2512.24455