Multispectral UV Imaging on Capacitive CMOS Arrays Enabled by Solution-Processed Metal-Oxide Nanoparticles

Fuente: arXiv
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Main Authors: Kundu, Suman, Shen, Tao, Betlem, Kai, Ghatkesar, Murali K, Steeneken, Peter G, Widdershoven, Frans P
Format: Preprint
Published: 2026
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author Kundu, Suman
Shen, Tao
Betlem, Kai
Ghatkesar, Murali K
Steeneken, Peter G
Widdershoven, Frans P
author_facet Kundu, Suman
Shen, Tao
Betlem, Kai
Ghatkesar, Murali K
Steeneken, Peter G
Widdershoven, Frans P
contents Ultraviolet (UV) imagers are important for a variety of applications, such as quality inspection in the semiconductor industry, forensics and food quality inspection, but are often costly because they require dedicated semiconductor process flows. Here, an imaging chip is introduced that has been fabricated using standard 40 nm complementary metal-oxidesemiconductor (CMOS) technology. Instead of using a conventional charge-based photodetection principle, the imager uses a capacitive operation principle where UV-light causes capacitance changes via the photodielectric effect in a functionalization layer, which are measured by the underlying CMOS circuitry. This spin-coated or inkjet-printed functionalization layer consists of solution-processed, wide-bandgap, semiconducting metaloxide nanoparticles, and facilitates multispectral imaging. The sensors exhibit low noiseequivalent powers (17-138 fW Hz^-1/2) across the UV bands. Unlike conventional silicon CMOS imagers, the present capacitive-CMOS platform is inherently visible-blind, providing selective UV detection. This work positions late-functionalized capacitive-CMOS arrays as a route toward reducing the cost of UV imagers, which can lead to their more widespread implementation in consumer and low-volume application-specific products.
format Preprint
id arxiv_https___arxiv_org_abs_2601_00320
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Multispectral UV Imaging on Capacitive CMOS Arrays Enabled by Solution-Processed Metal-Oxide Nanoparticles
Kundu, Suman
Shen, Tao
Betlem, Kai
Ghatkesar, Murali K
Steeneken, Peter G
Widdershoven, Frans P
Instrumentation and Detectors
Materials Science
Applied Physics
Optics
Ultraviolet (UV) imagers are important for a variety of applications, such as quality inspection in the semiconductor industry, forensics and food quality inspection, but are often costly because they require dedicated semiconductor process flows. Here, an imaging chip is introduced that has been fabricated using standard 40 nm complementary metal-oxidesemiconductor (CMOS) technology. Instead of using a conventional charge-based photodetection principle, the imager uses a capacitive operation principle where UV-light causes capacitance changes via the photodielectric effect in a functionalization layer, which are measured by the underlying CMOS circuitry. This spin-coated or inkjet-printed functionalization layer consists of solution-processed, wide-bandgap, semiconducting metaloxide nanoparticles, and facilitates multispectral imaging. The sensors exhibit low noiseequivalent powers (17-138 fW Hz^-1/2) across the UV bands. Unlike conventional silicon CMOS imagers, the present capacitive-CMOS platform is inherently visible-blind, providing selective UV detection. This work positions late-functionalized capacitive-CMOS arrays as a route toward reducing the cost of UV imagers, which can lead to their more widespread implementation in consumer and low-volume application-specific products.
title Multispectral UV Imaging on Capacitive CMOS Arrays Enabled by Solution-Processed Metal-Oxide Nanoparticles
topic Instrumentation and Detectors
Materials Science
Applied Physics
Optics
url https://arxiv.org/abs/2601.00320