Detection of MEMS Acoustics via Scanning Tunneling Microscopy
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arXiv
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| Autores principales: | , , , , |
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| Formato: | Preprint |
| Publicado: |
2026
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| _version_ | 1866908752349757440 |
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| author | Elbertse, R. J. G. Xu, M. Keşkekler, A. Otte, S. Norte, R. A. |
| author_facet | Elbertse, R. J. G. Xu, M. Keşkekler, A. Otte, S. Norte, R. A. |
| contents | Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to perform minimally invasive-measurements of high aspect-ratio MEMS resonators using the STM tip as both actuator and detector. Operating at cryogenic temperatures, we resolve acoustic modes of millimeter-scale, high-Q membranes with picometer spatial precision, without making use of lasers or capacitive coupling. The tunneling junction introduces negligible back-action or heating, enabling direct access to the intrinsic dynamics of microgram-mass oscillators. In this work we explore three different measurement modalities, each offering unique advantages. Combined, they provide a pathway to quantum-level readout and exquisite high-precision measurements of forces, displacements, and pressures at cryogenic conditions. This technique provides a general platform for minimally-perturbative detection across a wide range of nanomechanical and quantum devices. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2601_01074 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Detection of MEMS Acoustics via Scanning Tunneling Microscopy Elbertse, R. J. G. Xu, M. Keşkekler, A. Otte, S. Norte, R. A. Mesoscale and Nanoscale Physics Instrumentation and Detectors Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to perform minimally invasive-measurements of high aspect-ratio MEMS resonators using the STM tip as both actuator and detector. Operating at cryogenic temperatures, we resolve acoustic modes of millimeter-scale, high-Q membranes with picometer spatial precision, without making use of lasers or capacitive coupling. The tunneling junction introduces negligible back-action or heating, enabling direct access to the intrinsic dynamics of microgram-mass oscillators. In this work we explore three different measurement modalities, each offering unique advantages. Combined, they provide a pathway to quantum-level readout and exquisite high-precision measurements of forces, displacements, and pressures at cryogenic conditions. This technique provides a general platform for minimally-perturbative detection across a wide range of nanomechanical and quantum devices. |
| title | Detection of MEMS Acoustics via Scanning Tunneling Microscopy |
| topic | Mesoscale and Nanoscale Physics Instrumentation and Detectors |
| url | https://arxiv.org/abs/2601.01074 |