Wafer-scale High-k SrTiO3 Dielectrics with Rational Barrier-layer Design for Low Leakage and High Charge Density

Fuente: arXiv
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Bibliographic Details
Main Authors: Mohseni, Majid, Varshney, Shivasheesh, Jeong, Seung Gyo, Walton, Amber, Frisbie, C. Daniel, Jalan, Bharat
Format: Preprint
Published: 2026
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