Spatial resolution(s) in atom probe tomography

Fuente: arXiv
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Auteurs principaux: Gault, Baptiste, De Geuser, Frédéric, Freysoldt, Christoph, Klaes, Benjamin, Vurpillot, François
Format: Preprint
Publié: 2026
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author Gault, Baptiste
De Geuser, Frédéric
Freysoldt, Christoph
Klaes, Benjamin
Vurpillot, François
author_facet Gault, Baptiste
De Geuser, Frédéric
Freysoldt, Christoph
Klaes, Benjamin
Vurpillot, François
contents Atom probe tomography (APT) is often quoted to provide "atomic-scale" analysis of materials in three dimensions. Despite efforts to quantify APT's spatial resolution, misunderstanding remain regarding its true spatial performance. If the depth resolution was once reported to be 20 pm, quoting this value outside of its specific context is misleading and should be avoided. The resolution achievable in pure metals, at one specific location within one reconstructed dataset, does not generally apply across materials or analysis conditions, or even throughout a single tomographic reconstruction. Here, we review various efforts at defining and measuring the spatial resolution in the study of single phase and single element materials - i.e. pure metals - in field-ion microscopy (FIM) and APT. We also report on the degradation of the resolution arising from ion optical devices used to improve the mass-resolution. We aim to offer some perspective as to how reported resolutions may be or may not be of any relevance to most of the materials characterisation efforts by APT, including cases of precipitates in a matrix that emphasise the need to consider an effective resolution. Finally, we discuss concepts to improve the spatial accuracy of the technique in a relatively distant future.
format Preprint
id arxiv_https___arxiv_org_abs_2601_04586
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Spatial resolution(s) in atom probe tomography
Gault, Baptiste
De Geuser, Frédéric
Freysoldt, Christoph
Klaes, Benjamin
Vurpillot, François
Materials Science
Instrumentation and Detectors
Atom probe tomography (APT) is often quoted to provide "atomic-scale" analysis of materials in three dimensions. Despite efforts to quantify APT's spatial resolution, misunderstanding remain regarding its true spatial performance. If the depth resolution was once reported to be 20 pm, quoting this value outside of its specific context is misleading and should be avoided. The resolution achievable in pure metals, at one specific location within one reconstructed dataset, does not generally apply across materials or analysis conditions, or even throughout a single tomographic reconstruction. Here, we review various efforts at defining and measuring the spatial resolution in the study of single phase and single element materials - i.e. pure metals - in field-ion microscopy (FIM) and APT. We also report on the degradation of the resolution arising from ion optical devices used to improve the mass-resolution. We aim to offer some perspective as to how reported resolutions may be or may not be of any relevance to most of the materials characterisation efforts by APT, including cases of precipitates in a matrix that emphasise the need to consider an effective resolution. Finally, we discuss concepts to improve the spatial accuracy of the technique in a relatively distant future.
title Spatial resolution(s) in atom probe tomography
topic Materials Science
Instrumentation and Detectors
url https://arxiv.org/abs/2601.04586