Kaufmann, J., Siefke, T., & Zeitner, U. (2026). Ultra-shallow EUV and soft X-ray gratings fabricated by broad-beam nitrogen ion irradiation.
Citazione stile Chigago Style (17a edizione)Kaufmann, Johannes, Thomas Siefke, e Uwe Zeitner. Ultra-shallow EUV and Soft X-ray Gratings Fabricated by Broad-beam Nitrogen Ion Irradiation. 2026.
Citatione MLA (9a ed.)Kaufmann, Johannes, et al. Ultra-shallow EUV and Soft X-ray Gratings Fabricated by Broad-beam Nitrogen Ion Irradiation. 2026.
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