APA (7th ed.) Citation

Kaufmann, J., Siefke, T., & Zeitner, U. (2026). Ultra-shallow EUV and soft X-ray gratings fabricated by broad-beam nitrogen ion irradiation.

Chicago Style (17th ed.) Citation

Kaufmann, Johannes, Thomas Siefke, and Uwe Zeitner. Ultra-shallow EUV and Soft X-ray Gratings Fabricated by Broad-beam Nitrogen Ion Irradiation. 2026.

MLA (9th ed.) Citation

Kaufmann, Johannes, et al. Ultra-shallow EUV and Soft X-ray Gratings Fabricated by Broad-beam Nitrogen Ion Irradiation. 2026.