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Autonomous Sampling and SHAP Interpretation of Deposition-Rates in Bipolar HiPIMS

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Wieczorek, Alexander, Rodkey, Nathan, Sommerhäuser, Jan, Hattrick-Simpers, Jason, Siol, Sebastian
Format:	Preprint
Publié:	2026
Sujets:	Plasma Physics Materials Science
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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