Synthesis of epitaxial TaO$_2$ thin films on Al$_2$O$_3$ by suboxide molecular-beam epitaxy and thermal laser epitaxy
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arXiv
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| Main Authors: | Birkhölzer, Yorick A., Park, Anna S., Schnitzer, Noah, Kaaret, Jeffrey Z., Gregory, Benjamin Z., Kraay, Tomas A., Schwaigert, Tobias, Barone, Matthew R., Faeth, Brendan D., Hensling, Felix V. E., Bosch, Iris C. G. van den, Kiens, Ellen M., Baeumer, Christoph, Bergamasco, Enrico, Grüninger, Markus, Bordovalos, Alexander, Chaulagain, Suresh, Podraza, Nikolas J., Tokarz, Waldemar, Tabis, Wojciech, Wahila, Matthew J., Sarker, Suchismita, Pollock, Christopher J., Shang, Shun-Li, Liu, Zi-Kui, Artrith, Nongnuch, de Groot, Frank M. F., Benedek, Nicole A., Singer, Andrej, Muller, David A., Schlom, Darrell G. |
|---|---|
| Format: | Preprint |
| Published: |
2026
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