Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas

Fuente: arXiv

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Bibliographic Details
Main Authors:	Chen, Zhaoyu, Chen, Zili, Wang, Yu, Giesekus, Jonas, Jiang, Wei, Ding, Yonghua, Xia, Donghui, Zhang, Ya, Schulze, Julian
Format:	Preprint
Published:	2026
Subjects:	Plasma Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2601.07386