Copertina

Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas

Fuente: arXiv

Salvato in:

Dettagli Bibliografici
Autori principali:	Chen, Zhaoyu, Chen, Zili, Wang, Yu, Giesekus, Jonas, Jiang, Wei, Ding, Yonghua, Xia, Donghui, Zhang, Ya, Schulze, Julian
Natura:	Preprint
Pubblicazione:	2026
Soggetti:	Plasma Physics
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

Documenti analoghi

Multi-diagnostic characterization of inductively coupled discharges with tailored waveform substrate bias for precise control of plasma etching
di: Giesekus, Jonas, et al.
Pubblicazione: (2025)

Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation
di: Joel, Moreno, et al.
Pubblicazione: (2025)

Investigation on Plasma Characteristics and In‐Flight Spheroidization Boron Carbide Powders in Radio Frequency Inductively Coupled Plasma
di: Xingyue Jin, et al.
Pubblicazione: (2025)

Multiscale Simulation of Capacitively Coupled Ar/CHF 3 Discharges Driven by Sawtooth‐Tailored Voltage Waveforms
di: Wan Dong, et al.
Pubblicazione: (2025)

Particle-In-Cell Informed Kinetic Modeling of Nonlinear Skin Effects in Low-Frequency Inductively Coupled Plasmas
di: Sun, Haomin, et al.
Pubblicazione: (2025)

Study on the Mutual Repulsion/Attraction Characteristics Within an Atmospheric‐Pressure Pulsed Radio Frequency Plasma Jet Array
di: Denghui Bao, et al.
Pubblicazione: (2026)

Low Frequency Shock Structures in Collisional and Viscous Dusty Plasmas in the Presence of q ‐Distributed Electrons
di: Md. Mehedi Hasan, et al.
Pubblicazione: (2025)

Discharge Characteristics and α–γ Mode Transition Law of CO 2 Radio Frequency Capacitively Coupled Plasma at Different Gap Distances
di: Zifan Ye, et al.
Pubblicazione: (2025)

Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
di: Jie Li, et al.
Pubblicazione: (2024)

On the enhanced Balmer emission of hydrogen in helium Capacitively Coupled Radio Frequency (CCRF) plasma
di: S, Varsha, et al.
Pubblicazione: (2025)

Progress in Electron Energy Modeling for Plasma Flows and Discharges
di: Parent, Bernard, et al.
Pubblicazione: (2024)

Cross-Tokamak Deployment Study of Plasma Disruption Predictors Based on Convolutional Autoencoder
di: Ai, Xinkun, et al.
Pubblicazione: (2023)

Impact of Radio Frequency Power on Columnar and Filamentary Modes in Atmospheric Pressure Very Low Frequency Plasma within Pores
di: Wang, Haozhe, et al.
Pubblicazione: (2025)

Influence of Generalized ( r , q ) Electron Distribution Function on Dust Grain Charging in a Dusty Plasma
di: Aniss Ryad Ladjeroud, et al.
Pubblicazione: (2026)

Occurrence of Flat-top Electron Velocity Distributions in Magnetotail Plasma Jets
di: Richard, Louis, et al.
Pubblicazione: (2026)

Designing a Validation Experiment for Radio Frequency Condensation
di: Fu, Lanke, et al.
Pubblicazione: (2024)

Non-Inductive Current Start-Up Using Multi-Harmonic Electron Cyclotron Wave and Current Ramp-Up Through Combined Electron Cyclotron Wave and Ohmic Heating in EXL-50U Spherical Torus
di: Jiang, Xinchen, et al.
Pubblicazione: (2025)

Mean Force Emission Theory for Classical Bremsstrahlung in Electron-Ion Plasmas
di: Kinney, Julian P., et al.
Pubblicazione: (2025)

Ion Polytropic Coefficient in Bounded Plasmas With Cairns–Tsallis Distributed Electrons
di: Majid Khan, et al.
Pubblicazione: (2025)

Investigation of Laser Plasma Instabilities driven by Coupled High-Power Laser Beams in Magnetized Underdense Plasmas
di: Lacoste, C. L. C., et al.
Pubblicazione: (2026)

Photometric Diagnostic of the Sheath Dynamics and Electron Density Trends in Single and Dual Frequency CCRF Argon Plasmas
di: Daniel Zuhayra, et al.
Pubblicazione: (2025)

Effects of Dust Size Distribution on Shock Waves in Dusty Plasma With Nonextensive Electron
di: Bo Liu, et al.
Pubblicazione: (2025)

Preliminary Exploration on the Low-Pressure Ar-O2 Plasma Generated by Low-Frequency Alternating Current (AC) Power Supply
di: Wali, Niaz, et al.
Pubblicazione: (2024)

Intermittent Viscoelastic Turbulence in Strongly Coupled Plasmas
di: Wani, Rauoof, et al.
Pubblicazione: (2025)

On Density Limit of Lower Hybrid Current Drive caused by Parametric Decay Instability in Tokamak Plasmas
di: Chen, Kunyu, et al.
Pubblicazione: (2024)

Self-Consistent Numerical Framework for Multiscale Circuit-Plasma Coupling with Secondary Electron Emission
di: Kim, Hongbin, et al.
Pubblicazione: (2026)

A Subgrid Model for Electron-Scale Turbulent Transport in Global Ion-Scale Gyrokinetic Simulations of Tokamak Plasmas
di: Tirkas, Stefan, et al.
Pubblicazione: (2024)

Effects of turbulence spreading and symmetry breaking on edge shear flow during sawtooth cycles in J-TEXT tokamak
di: Ding, Xiaoguan, et al.
Pubblicazione: (2025)

Propagation of Nonlinear Waves in Multi-Component Pair Plasmas and Electron-Positron-Ion Plasmas
di: Rajib, Tanvir I.
Pubblicazione: (2020)

Electron dynamics and SiO2 etching profile evolution in capacitive Ar/CHF3 discharges driven by sawtooth-tailored voltage waveforms
di: Dong, Wan, et al.
Pubblicazione: (2024)

Energy Depletion and Re-Acceleration of Driver Electrons in a Plasma-Wakefield Accelerator
di: Peña, F., et al.
Pubblicazione: (2023)

Effect of Kaniadakis Distributed Electrons on the Dust Acoustic Waves in a Charge Varying Dusty Plasma
di: Mustapha Bacha
Pubblicazione: (2025)

Charge State Distributions in Dense Plasmas
di: White, J., et al.
Pubblicazione: (2020)

Collisionless Larmor Coupling and Blob Formation in a Laser-Plasma Expanding into a Magnetized Ambient Plasma
di: Rovige, Lucas, et al.
Pubblicazione: (2026)

Hybrid PIC / MC ‐ CVAE Framework for Self‐Bias Voltage Prediction and Plasma‐Circuit Coupling in Capacitively Coupled Plasma
di: Suxin Bao, et al.
Pubblicazione: (2025)

Dynamics of Ion‐Acoustic Solitary Waves in Multicomponent Plasmas With Non‐Maxwellian Electron Distributions: Effects of Specific Plasma Composition on Generation and Overtaking Interactions
di: F. Asiri, et al.
Pubblicazione: (2026)

Pushing the Frontiers of Light: Magnetized Plasma Lenses and Chirp Tailoring for Extreme Intensities
di: Dhalia, Trishul, et al.
Pubblicazione: (2025)

Coherent Control of Relativistic Electron Dynamics in Plasma Nanophotonics
di: Dulat, Ankit, et al.
Pubblicazione: (2024)

Dispersion in Rotating Electron-Positron-Ion Quantum Plasma
di: Saxena, Atherv, et al.
Pubblicazione: (2025)

Relaxation of a Two Electron-Temperature Relativistic Hot Electron-Positron-Ion Plasma
di: Shazad, Usman, et al.
Pubblicazione: (2025)