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Transition Metal Dichalcogenide MoS${}_2$: oxygen and fluorine functionalization for selective plasma processing

Fuente: arXiv

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Bibliographic Details
Main Authors:	Polyachenko, Yury, Barsukov, Yuri, Khalid, Shoaib, Kaganovich, Igor
Format:	Preprint
Published:	2026
Subjects:	Materials Science Mesoscale and Nanoscale Physics Chemical Physics
Online Access:	Acceder al recurso
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