Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners
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arXiv
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| Format: | Preprint |
| Published: |
2026
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| _version_ | 1866917207537090560 |
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| author | Natu, Aditya HosseinNia, Hassan |
| author_facet | Natu, Aditya HosseinNia, Hassan |
| contents | Piezoelectric nanopositioning systems are widely used in precision applications that require nanometer accuracy and high-speed motion; however, lightly damped resonances and pronounced cross-axis coupling severely limit bandwidth and disturbance rejection. This paper presents a decentralized dual-loop control strategy for a two-axis nanopositioner, combining an inner non-minimum-phase resonant damping controller with an outer motion controller on each axis. The dominant diagonal resonance is actively damped to enable closed-loop bandwidths beyond the first structural mode, while a parallel band-pass damping path is specifically tuned to a higher-order resonance that predominantly affects the cross-coupling channels. Experimental results demonstrate that this targeted band-pass damping substantially reduces cross-axis coupling and enhances disturbance rejection, without compromising tracking accuracy. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2601_11982 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners Natu, Aditya HosseinNia, Hassan Systems and Control Piezoelectric nanopositioning systems are widely used in precision applications that require nanometer accuracy and high-speed motion; however, lightly damped resonances and pronounced cross-axis coupling severely limit bandwidth and disturbance rejection. This paper presents a decentralized dual-loop control strategy for a two-axis nanopositioner, combining an inner non-minimum-phase resonant damping controller with an outer motion controller on each axis. The dominant diagonal resonance is actively damped to enable closed-loop bandwidths beyond the first structural mode, while a parallel band-pass damping path is specifically tuned to a higher-order resonance that predominantly affects the cross-coupling channels. Experimental results demonstrate that this targeted band-pass damping substantially reduces cross-axis coupling and enhances disturbance rejection, without compromising tracking accuracy. |
| title | Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners |
| topic | Systems and Control |
| url | https://arxiv.org/abs/2601.11982 |