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Auteurs principaux: Natu, Aditya, HosseinNia, Hassan
Format: Preprint
Publié: 2026
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Accès en ligne:https://arxiv.org/abs/2601.11982
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author Natu, Aditya
HosseinNia, Hassan
author_facet Natu, Aditya
HosseinNia, Hassan
contents Piezoelectric nanopositioning systems are widely used in precision applications that require nanometer accuracy and high-speed motion; however, lightly damped resonances and pronounced cross-axis coupling severely limit bandwidth and disturbance rejection. This paper presents a decentralized dual-loop control strategy for a two-axis nanopositioner, combining an inner non-minimum-phase resonant damping controller with an outer motion controller on each axis. The dominant diagonal resonance is actively damped to enable closed-loop bandwidths beyond the first structural mode, while a parallel band-pass damping path is specifically tuned to a higher-order resonance that predominantly affects the cross-coupling channels. Experimental results demonstrate that this targeted band-pass damping substantially reduces cross-axis coupling and enhances disturbance rejection, without compromising tracking accuracy.
format Preprint
id arxiv_https___arxiv_org_abs_2601_11982
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners
Natu, Aditya
HosseinNia, Hassan
Systems and Control
Piezoelectric nanopositioning systems are widely used in precision applications that require nanometer accuracy and high-speed motion; however, lightly damped resonances and pronounced cross-axis coupling severely limit bandwidth and disturbance rejection. This paper presents a decentralized dual-loop control strategy for a two-axis nanopositioner, combining an inner non-minimum-phase resonant damping controller with an outer motion controller on each axis. The dominant diagonal resonance is actively damped to enable closed-loop bandwidths beyond the first structural mode, while a parallel band-pass damping path is specifically tuned to a higher-order resonance that predominantly affects the cross-coupling channels. Experimental results demonstrate that this targeted band-pass damping substantially reduces cross-axis coupling and enhances disturbance rejection, without compromising tracking accuracy.
title Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners
topic Systems and Control
url https://arxiv.org/abs/2601.11982