Zhang, S., Volynets, A., Curley, G. A., & Booth, J. (2026). Oxygen atom density and kinetics in intermediate-pressure radiofrequency capacitively-coupled plasmas in pure O2.
Chicago Style (17th ed.) CitationZhang, Shu, Andrey Volynets, Garrett A. Curley, and Jean-Paul Booth. Oxygen Atom Density and Kinetics in Intermediate-pressure Radiofrequency Capacitively-coupled Plasmas in Pure O2. 2026.
MLA (9th ed.) CitationZhang, Shu, et al. Oxygen Atom Density and Kinetics in Intermediate-pressure Radiofrequency Capacitively-coupled Plasmas in Pure O2. 2026.
Warning: These citations may not always be 100% accurate.