Copertina

Oxygen atom density and kinetics in intermediate-pressure radiofrequency capacitively-coupled plasmas in pure O2

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Zhang, Shu, Volynets, Andrey, Curley, Garrett A., Booth, Jean-Paul
Natura:	Preprint
Pubblicazione:	2026
Soggetti:	Plasma Physics Applied Physics
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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