Scaling Two-Dimensional Semiconductor Nanoribbons for High-Performance Electronics

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Hauptverfasser: Lan, Hao-Yu, Yang, Shao-Heng, Cho, Yongjae, Tan, Yuanqiu, Cai, Jun, Sun, Zheng, Li, Chenyang, Huang, Lin-Yun, Wan, Yi, Li, Lain-Jong, Beechem, Thomas, Appenzeller, Joerg, Chen, Zhihong
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Veröffentlicht: 2026
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author Lan, Hao-Yu
Yang, Shao-Heng
Cho, Yongjae
Tan, Yuanqiu
Cai, Jun
Sun, Zheng
Li, Chenyang
Huang, Lin-Yun
Wan, Yi
Li, Lain-Jong
Beechem, Thomas
Appenzeller, Joerg
Chen, Zhihong
author_facet Lan, Hao-Yu
Yang, Shao-Heng
Cho, Yongjae
Tan, Yuanqiu
Cai, Jun
Sun, Zheng
Li, Chenyang
Huang, Lin-Yun
Wan, Yi
Li, Lain-Jong
Beechem, Thomas
Appenzeller, Joerg
Chen, Zhihong
contents As silicon transistors scale toward future technology nodes, three-dimensional architectures -- including gate-all-around (GAA) nanoribbon and complementary field-effect transistors (CFETs) -- require channel widths in the tens of nanometers to meet density targets. Monolayer transition metal dichalcogenides (TMDs), with their atomically thin bodies, are promising channel materials for these architectures, yet most TMD-based FETs remain limited to micrometer-scale widths. Here, we show that channel width scaling of monolayer MoS2 nanoribbon transistors not only preserves but also enhances device performance. Reducing the channel width from hundreds of nanometers to $\sim$30--40 nm increases the median on-current density by $\sim$42% and reduces the median subthreshold swing by $\sim$16%, with a champion device reaching 995 $μ$A $μ$m$^{-1}$ at a drain-to-source voltage of 1 V and an overdrive voltage of 2.5 V. We attribute these improvements to three mechanisms: minimal edge-induced disorder, enhanced gate electrostatics at ribbon edges, and more efficient side-contact injection, together reducing contact resistance from $\sim$860 $Ω$ $μ$m to $\sim$270 $Ω$ $μ$m. Extending the platform to n-type WS2 and p-type WSe2 FETs, we achieve WSe2 p-FET on-currents of 357 $μ$A $μ$m$^{-1}$. These findings suggest that monolayer TMD nanoribbon FETs are promising candidates for future ultra-scaled electronics.
format Preprint
id arxiv_https___arxiv_org_abs_2601_13696
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Scaling Two-Dimensional Semiconductor Nanoribbons for High-Performance Electronics
Lan, Hao-Yu
Yang, Shao-Heng
Cho, Yongjae
Tan, Yuanqiu
Cai, Jun
Sun, Zheng
Li, Chenyang
Huang, Lin-Yun
Wan, Yi
Li, Lain-Jong
Beechem, Thomas
Appenzeller, Joerg
Chen, Zhihong
Materials Science
Mesoscale and Nanoscale Physics
As silicon transistors scale toward future technology nodes, three-dimensional architectures -- including gate-all-around (GAA) nanoribbon and complementary field-effect transistors (CFETs) -- require channel widths in the tens of nanometers to meet density targets. Monolayer transition metal dichalcogenides (TMDs), with their atomically thin bodies, are promising channel materials for these architectures, yet most TMD-based FETs remain limited to micrometer-scale widths. Here, we show that channel width scaling of monolayer MoS2 nanoribbon transistors not only preserves but also enhances device performance. Reducing the channel width from hundreds of nanometers to $\sim$30--40 nm increases the median on-current density by $\sim$42% and reduces the median subthreshold swing by $\sim$16%, with a champion device reaching 995 $μ$A $μ$m$^{-1}$ at a drain-to-source voltage of 1 V and an overdrive voltage of 2.5 V. We attribute these improvements to three mechanisms: minimal edge-induced disorder, enhanced gate electrostatics at ribbon edges, and more efficient side-contact injection, together reducing contact resistance from $\sim$860 $Ω$ $μ$m to $\sim$270 $Ω$ $μ$m. Extending the platform to n-type WS2 and p-type WSe2 FETs, we achieve WSe2 p-FET on-currents of 357 $μ$A $μ$m$^{-1}$. These findings suggest that monolayer TMD nanoribbon FETs are promising candidates for future ultra-scaled electronics.
title Scaling Two-Dimensional Semiconductor Nanoribbons for High-Performance Electronics
topic Materials Science
Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2601.13696