A kinetic-moment framework for electron energy dynamics in capacitively coupled plasmas: absorption, conversion, transport, and dissipation
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arXiv
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| Main Authors: | Yao, Jianxiong, Zhang, Zeduan, He, Feng, Miao, Jinsong, Ouyang, Jiting, Zheng, Bocong |
|---|---|
| Format: | Preprint |
| Published: |
2026
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| Subjects: | |
| Online Access: | |
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