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Main Authors: Xu, Han, Li, Ming, Wang, Shuo, Ren, Zhe, Liu, Peng, Zhang, Yi, Dong, Yuhui, Zhou, Liang
Format: Preprint
Published: 2026
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Online Access:https://arxiv.org/abs/2601.15776
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author Xu, Han
Li, Ming
Wang, Shuo
Ren, Zhe
Liu, Peng
Zhang, Yi
Dong, Yuhui
Zhou, Liang
author_facet Xu, Han
Li, Ming
Wang, Shuo
Ren, Zhe
Liu, Peng
Zhang, Yi
Dong, Yuhui
Zhou, Liang
contents Accurate and efficient wave-optics simulation of partially coherent light transport systems is critical for the design of advanced optical systems, ranging from computational lithography to diffraction-limited storage rings (DLSR). However, traditional approaches based on Coherent Mode Decomposition suffer from high computational costs due to the propagating massive sets of two-dimensional modes. In this paper, we propose the Coherent Mode Decoupling (CMDC) algorithm, a high-throughput computational framework designed to accelerate these simulations by orders of magnitude without compromising physical fidelity. The method factorizes 2D modes into efficient one-dimensional (1D) components, while crucially incorporating a subspace compression strategy to capture non-separable coupling effects. We demonstrated the generality and robustness of this framework in applications ranging from computational lithography to coherent beamlines of DLSR.
format Preprint
id arxiv_https___arxiv_org_abs_2601_15776
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Coherent Mode Decoupling: A Versatile Framework for High-Throughput Partially Coherent Light Transport
Xu, Han
Li, Ming
Wang, Shuo
Ren, Zhe
Liu, Peng
Zhang, Yi
Dong, Yuhui
Zhou, Liang
Optics
Accurate and efficient wave-optics simulation of partially coherent light transport systems is critical for the design of advanced optical systems, ranging from computational lithography to diffraction-limited storage rings (DLSR). However, traditional approaches based on Coherent Mode Decomposition suffer from high computational costs due to the propagating massive sets of two-dimensional modes. In this paper, we propose the Coherent Mode Decoupling (CMDC) algorithm, a high-throughput computational framework designed to accelerate these simulations by orders of magnitude without compromising physical fidelity. The method factorizes 2D modes into efficient one-dimensional (1D) components, while crucially incorporating a subspace compression strategy to capture non-separable coupling effects. We demonstrated the generality and robustness of this framework in applications ranging from computational lithography to coherent beamlines of DLSR.
title Coherent Mode Decoupling: A Versatile Framework for High-Throughput Partially Coherent Light Transport
topic Optics
url https://arxiv.org/abs/2601.15776