Facile Optimization of Combinatorial Sputtering Processes with Arbitrary Numbers of Components for Targeted Compositions

Fuente: arXiv

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Bibliographic Details
Main Authors:	Fields, Shelby Sutton, White, Christopher David, Knipling, Keith, Bennett, Steven
Format:	Preprint
Published:	2026
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2601.16055