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| Main Authors: | , , , , |
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| Format: | Preprint |
| Published: |
2026
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2601.17816 |
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| _version_ | 1866914282920214528 |
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| author | Papamakarios, Savvas Manousidaki, Maria Stavrou, Michalis Gray, David Farsari, Maria |
| author_facet | Papamakarios, Savvas Manousidaki, Maria Stavrou, Michalis Gray, David Farsari, Maria |
| contents | High-resolution lithographic techniques are often limited by low volumetric throughput, since there is no universal and scalable manufacturing process that can produce 3D metasurfaces. In this work, we demonstrate a high-speed holographic 3D printing platform based on spatiotemporal beam shaping, exceeding the repetition rate while keeping the resolution high. The system integrates a femtosecond laser source with a spectral pulse compressor and a beam shaper to project uniform, axially confined light fields to project patterns directly on the advanced photoresists using a Digital Micromirror Device DMD. We investigate the process window for rapid polymerization, optimizing the photoinitiator choice to eliminate thermal crosstalk at high repetition rates. Using this setup, we achieve a production throughput of more than a million voxels per second with sub-micron resolution below 400 nm. The system's reliability is validated through the fabrication of large-area woodpile-like lattices and uniform micropillar arrays, establishing a workflow for scalable manufacturing of micro-optical components. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2601_17816 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | High-Repetition-Rate Projection Multiphoton Lithography for Large-Area Sub-Micron 3D Printing Papamakarios, Savvas Manousidaki, Maria Stavrou, Michalis Gray, David Farsari, Maria Optics High-resolution lithographic techniques are often limited by low volumetric throughput, since there is no universal and scalable manufacturing process that can produce 3D metasurfaces. In this work, we demonstrate a high-speed holographic 3D printing platform based on spatiotemporal beam shaping, exceeding the repetition rate while keeping the resolution high. The system integrates a femtosecond laser source with a spectral pulse compressor and a beam shaper to project uniform, axially confined light fields to project patterns directly on the advanced photoresists using a Digital Micromirror Device DMD. We investigate the process window for rapid polymerization, optimizing the photoinitiator choice to eliminate thermal crosstalk at high repetition rates. Using this setup, we achieve a production throughput of more than a million voxels per second with sub-micron resolution below 400 nm. The system's reliability is validated through the fabrication of large-area woodpile-like lattices and uniform micropillar arrays, establishing a workflow for scalable manufacturing of micro-optical components. |
| title | High-Repetition-Rate Projection Multiphoton Lithography for Large-Area Sub-Micron 3D Printing |
| topic | Optics |
| url | https://arxiv.org/abs/2601.17816 |