FinLN: 3D Fin Lithium Niobate Acoustic Resonators
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arXiv
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| Autores principales: | , |
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| Formato: | Preprint |
| Publicado: |
2026
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| _version_ | 1866911398924124160 |
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| author | Ni, Haorui Bhave, Sunil |
| author_facet | Ni, Haorui Bhave, Sunil |
| contents | We demonstrate a three-dimensional fin lithium niobate (FinLN) acoustic resonator fabricated from thick lithium niobate on insulator using deep ion etching and sidewall electrode patterning. The FinLN geometry enables strong three-dimensional acoustic confinement and enhanced electromechanical coupling while maintaining a compact device footprint. The fabricated devices operate near 300 MHz and exhibit an effective electromechanical coupling coefficient of 6.2% with a mechanical quality factor of 430, in good agreement with finite-element simulations. Compared to planar surface acoustic wave resonators fabricated on the same wafer, the FinLN configuration achieves an 1.8x enhancement in effective coupling. This work establishes FinLN as a promising platform for compact, high-performance RF MEMS and piezo-optomechanical systems. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2601_18043 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | FinLN: 3D Fin Lithium Niobate Acoustic Resonators Ni, Haorui Bhave, Sunil Applied Physics We demonstrate a three-dimensional fin lithium niobate (FinLN) acoustic resonator fabricated from thick lithium niobate on insulator using deep ion etching and sidewall electrode patterning. The FinLN geometry enables strong three-dimensional acoustic confinement and enhanced electromechanical coupling while maintaining a compact device footprint. The fabricated devices operate near 300 MHz and exhibit an effective electromechanical coupling coefficient of 6.2% with a mechanical quality factor of 430, in good agreement with finite-element simulations. Compared to planar surface acoustic wave resonators fabricated on the same wafer, the FinLN configuration achieves an 1.8x enhancement in effective coupling. This work establishes FinLN as a promising platform for compact, high-performance RF MEMS and piezo-optomechanical systems. |
| title | FinLN: 3D Fin Lithium Niobate Acoustic Resonators |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2601.18043 |