Saved in:
Bibliographic Details
Main Authors: Almutlaq, Jawaher, Buzzi, Alessandro, Khaykin, Anders, Li, Linsen, Yzaguirre, William, Sirotin, Maxim, Gilbert, Gerald, Clark, Genevieve, Englund, Dirk
Format: Preprint
Published: 2026
Subjects:
Online Access:https://arxiv.org/abs/2601.20025
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1866912854050865152
author Almutlaq, Jawaher
Buzzi, Alessandro
Khaykin, Anders
Li, Linsen
Yzaguirre, William
Sirotin, Maxim
Gilbert, Gerald
Clark, Genevieve
Englund, Dirk
author_facet Almutlaq, Jawaher
Buzzi, Alessandro
Khaykin, Anders
Li, Linsen
Yzaguirre, William
Sirotin, Maxim
Gilbert, Gerald
Clark, Genevieve
Englund, Dirk
contents Quantum technologies promise secure communication networks and powerful new forms of information processing, but building these systems at scale remains a major challenge. Diamond is an especially attractive material for quantum devices because it can host atomic-scale defects that emit single photons and store quantum information with exceptional stability. However, fabricating the optical structures needed to control light in diamond typically relies on slow, bespoke processes that are difficult to scale. In this work, we introduce a manufacturing approach that brings diamond quantum photonics closer to industrial production. Instead of sequentially defining each device by lithography written directly on diamond, we fabricate high-precision silicon masks using commercial semiconductor foundries and transfer them onto diamond via microtransfer printing. These masks define large arrays of nanoscale optical structures, shifting the most demanding pattern-definition steps away from the diamond substrate, improving uniformity, yield, and throughput. Using this method, we demonstrate hundreds of diamond "quantum microchiplets" with improved optical performance and controlled interaction with quantum emitters. The chiplet format allows defective devices to be replaced and enables integration with existing photonic and electronic circuits. Our results show that high-quality diamond quantum devices can be produced using scalable, foundry-compatible techniques. This approach provides a practical pathway toward large-scale quantum photonic systems and hybrid quantum-classical technologies built on established semiconductor manufacturing infrastructure.
format Preprint
id arxiv_https___arxiv_org_abs_2601_20025
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics
Almutlaq, Jawaher
Buzzi, Alessandro
Khaykin, Anders
Li, Linsen
Yzaguirre, William
Sirotin, Maxim
Gilbert, Gerald
Clark, Genevieve
Englund, Dirk
Quantum Physics
Quantum technologies promise secure communication networks and powerful new forms of information processing, but building these systems at scale remains a major challenge. Diamond is an especially attractive material for quantum devices because it can host atomic-scale defects that emit single photons and store quantum information with exceptional stability. However, fabricating the optical structures needed to control light in diamond typically relies on slow, bespoke processes that are difficult to scale. In this work, we introduce a manufacturing approach that brings diamond quantum photonics closer to industrial production. Instead of sequentially defining each device by lithography written directly on diamond, we fabricate high-precision silicon masks using commercial semiconductor foundries and transfer them onto diamond via microtransfer printing. These masks define large arrays of nanoscale optical structures, shifting the most demanding pattern-definition steps away from the diamond substrate, improving uniformity, yield, and throughput. Using this method, we demonstrate hundreds of diamond "quantum microchiplets" with improved optical performance and controlled interaction with quantum emitters. The chiplet format allows defective devices to be replaced and enables integration with existing photonic and electronic circuits. Our results show that high-quality diamond quantum devices can be produced using scalable, foundry-compatible techniques. This approach provides a practical pathway toward large-scale quantum photonic systems and hybrid quantum-classical technologies built on established semiconductor manufacturing infrastructure.
title Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics
topic Quantum Physics
url https://arxiv.org/abs/2601.20025