Impact of O concentration on the thermal stability and decomposition mechanism of (Cr,Al)N compared to (Ti,Al)N thin films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Kümmerl, Pauline, Nayak, Ganesh Kumar, Leinenbach, Felix, Czigány, Zsolt, Primetzhofer, Daniel, Kolozsvári, Szilárd, Polcik, Peter, Hans, Marcus, Schneider, Jochen M.
Format:	Preprint
Published:	2026
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2601.20691