Decoupling effects of the resistive-switching behavior on the polarization reversal in ultrathin ferroelectric Hf0.5Zr0.5O2 films

Fuente: arXiv
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Main Authors: Zhou, Chao, Huang, Sizhe, Si, Yangyang, Ren, Zhongqi, Zhao, Jianyuan, Wang, Hailin, Li, Jingxuan, Cheng, Xianlong, Huang, Haoliang, Liu, Shi, Das, Sujit, Deng, Shiqing, Chen, Zuhuang
Format: Preprint
Published: 2026
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author Zhou, Chao
Huang, Sizhe
Si, Yangyang
Ren, Zhongqi
Zhao, Jianyuan
Wang, Hailin
Li, Jingxuan
Cheng, Xianlong
Huang, Haoliang
Liu, Shi
Das, Sujit
Deng, Shiqing
Chen, Zuhuang
author_facet Zhou, Chao
Huang, Sizhe
Si, Yangyang
Ren, Zhongqi
Zhao, Jianyuan
Wang, Hailin
Li, Jingxuan
Cheng, Xianlong
Huang, Haoliang
Liu, Shi
Das, Sujit
Deng, Shiqing
Chen, Zuhuang
contents HfO2-based ferroelectric films have attracted considerable attention as their nanoscale ferroelectricity and compatibility with cmos technology, fulfilling demands of emerging memory technologies. However, as films scale down, resistive-switching behavior becomes increasingly pronounced, intricately intertwining with the polarization-switching process and affecting ferroelectric switching factors often overlooked yet crucial for device performance optimization. By characterizing resistive-switching behavior and oxygen vacancy motion using tailored electric pulse schemes, we decouple the resistive-switching behavior from the overall switching process in ultrathin ferroelectric HZO films, which would otherwise erroneously inflate polarization values and increase coercive fields. Building on this, we elucidate endurance degradation mechanisms from dual perspectives of resistive switching and defect migration. Furthermore, we demonstrate the mitigated resistive switching activity by designing HfO2-based devices with symmetric oxide electrodes, achieving reduced coercive fields and improved cycling performances. This work provides crucial insights into the origins of inflated polarizations and reliability challenges in HfO2-based devices while offering a viable strategy to enhance ferroelectric properties for advanced memory applications.
format Preprint
id arxiv_https___arxiv_org_abs_2602_04133
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Decoupling effects of the resistive-switching behavior on the polarization reversal in ultrathin ferroelectric Hf0.5Zr0.5O2 films
Zhou, Chao
Huang, Sizhe
Si, Yangyang
Ren, Zhongqi
Zhao, Jianyuan
Wang, Hailin
Li, Jingxuan
Cheng, Xianlong
Huang, Haoliang
Liu, Shi
Das, Sujit
Deng, Shiqing
Chen, Zuhuang
Materials Science
HfO2-based ferroelectric films have attracted considerable attention as their nanoscale ferroelectricity and compatibility with cmos technology, fulfilling demands of emerging memory technologies. However, as films scale down, resistive-switching behavior becomes increasingly pronounced, intricately intertwining with the polarization-switching process and affecting ferroelectric switching factors often overlooked yet crucial for device performance optimization. By characterizing resistive-switching behavior and oxygen vacancy motion using tailored electric pulse schemes, we decouple the resistive-switching behavior from the overall switching process in ultrathin ferroelectric HZO films, which would otherwise erroneously inflate polarization values and increase coercive fields. Building on this, we elucidate endurance degradation mechanisms from dual perspectives of resistive switching and defect migration. Furthermore, we demonstrate the mitigated resistive switching activity by designing HfO2-based devices with symmetric oxide electrodes, achieving reduced coercive fields and improved cycling performances. This work provides crucial insights into the origins of inflated polarizations and reliability challenges in HfO2-based devices while offering a viable strategy to enhance ferroelectric properties for advanced memory applications.
title Decoupling effects of the resistive-switching behavior on the polarization reversal in ultrathin ferroelectric Hf0.5Zr0.5O2 films
topic Materials Science
url https://arxiv.org/abs/2602.04133